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This page is a summary of: RBS study of the effect of arsenic and phosphorus interfacial segregation upon the sintering of contacts between implanted polycrystalline silicon and aluminum: Silicon(1%), Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms, March 1985, Elsevier,
DOI: 10.1016/0168-583x(85)90566-x.
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