From plasma immersion ion implantation to deposition: a historical perspective on principles and trends

André Anders
  • Surface and Coatings Technology, July 2002, Elsevier
  • DOI: 10.1016/s0257-8972(02)00066-x

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http://dx.doi.org/10.1016/s0257-8972(02)00066-x

The following have contributed to this page: Professor Andre Anders