Width, structure and stability of sheaths in metal plasma immersion ion implantation and deposition: measurements and analytical considerations

André Anders
  • Surface and Coatings Technology, February 2001, Elsevier
  • DOI: 10.1016/s0257-8972(00)01017-3

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http://dx.doi.org/10.1016/s0257-8972(00)01017-3

The following have contributed to this page: Professor Andre Anders