Silicon oxide in SiSi bonded wafers

C Himcinschi, A Milekhin, M Friedrich, K Hiller, M Wiemer, T Gessner, S Schulze, D.R.T Zahn
  • Applied Surface Science, May 2001, Elsevier
  • DOI: 10.1016/s0169-4332(01)00146-5
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http://dx.doi.org/10.1016/s0169-4332(01)00146-5

The following have contributed to this page: Professor Dietrich RT Zahn