Optical and electrical properties of Ge-implanted SiO2 layers on n-Si and p-Si

W.S. Lee, J.Y. Jeong, H.B. Kim, K.H. Chae, C.N. Whang, S. Im, J.H. Song
  • Applied Surface Science, January 2001, Elsevier
  • DOI: 10.1016/s0169-4332(00)00704-2

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http://dx.doi.org/10.1016/s0169-4332(00)00704-2

The following have contributed to this page: Dr Keun Hwa Chae