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This page is a summary of: High performance positive DUV photoresists AZ® DX 1100P, AZ® DX 1200P. AZ® DX 1300P, AZ® DX 2034P, AZ® DX 2058P for advanced lithographic applications, Microelectronic Engineering, March 1998, Elsevier, DOI: 10.1016/s0167-9317(98)00078-1.
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