High performance positive DUV photoresists AZ® DX 1100P, AZ® DX 1200P. AZ® DX 1300P, AZ® DX 2034P, AZ® DX 2058P for advanced lithographic applications

W. Spiess, S. Funato, Y. Kinoshita, Y. Nozaki, G. Pawlowski
  • Microelectronic Engineering, March 1998, Elsevier
  • DOI: 10.1016/s0167-9317(98)00078-1

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http://dx.doi.org/10.1016/s0167-9317(98)00078-1