AFM-based fabrication of lateral single-electron tunneling structures for elevated temperature operation

L. Montelius, T. Junno, S.-B. Carlsson, L. Samuelson
  • Microelectronic Engineering, February 1997, Elsevier
  • DOI: 10.1016/s0167-9317(96)00114-1
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http://dx.doi.org/10.1016/s0167-9317(96)00114-1