Preparation of TiO2 films by CVD method and its electrical, structural and optical properties

V.G. Bessergenev, I.V. Khmelinskii, R.J.F. Pereira, V.V. Krisuk, A.E. Turgambaeva, I.K. Igumenov
  • Vacuum, January 2002, Elsevier
  • DOI: 10.1016/s0042-207x(01)00318-9
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The following have contributed to this page: Igor Khmelinskii