Multi-level interconnects for heterojunction bipolar transistor integrated circuit technologies

  • Gary A. Patrizi, Michael L. Lovejoy, Paul M. Enquist, Richard P. Schneider Jr., Hong Q. Hou
  • Thin Solid Films, December 1996, Elsevier
  • DOI: 10.1016/s0040-6090(96)09058-x

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http://dx.doi.org/10.1016/s0040-6090(96)09058-x