Bias enhanced deposition of highly oriented β-SiC thin films using low pressure hot filament chemical vapour deposition technique

V.C George, A Das, M Roy, A.K Dua, P Raj, D.R.T Zahn
  • Thin Solid Films, November 2002, Elsevier
  • DOI: 10.1016/s0040-6090(02)00789-7

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http://dx.doi.org/10.1016/s0040-6090(02)00789-7

The following have contributed to this page: Professor Dietrich RT Zahn