Zirconia and zirconia–silica thin films deposited by magnetron sputtering

  • D.H Kuo, C.H Chien, C.H Huang
  • Thin Solid Films, December 2002, Elsevier
  • DOI: 10.1016/s0040-6090(02)00738-1

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http://dx.doi.org/10.1016/s0040-6090(02)00738-1

The following have contributed to this page: Professor Dong-Hau Kuo