Nanotribology of amorphous hydrogenated carbon films using scanning probe microscopy

Te-Hua Fang, Cheng-I Weng, Jee-Gong Chang, Chi-Chuan Hwang
  • Thin Solid Films, September 2001, Elsevier
  • DOI: 10.1016/s0040-6090(01)01180-4
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