Boron diffusion from a spin-on source during rapid thermal processing

  • M Nolan, T Perova, R.A Moore, H.S Gamble
  • Journal of Non-Crystalline Solids, September 1999, Elsevier
  • DOI: 10.1016/s0022-3093(99)00379-8

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http://dx.doi.org/10.1016/s0022-3093(99)00379-8

The following have contributed to this page: Professor Tatiana Perova