Effects of low-energy ion beam glancing angle nitridation on nGaAs surface and Co–nGaAs Schottky contact properties

  • Š. Meškinis, K. Šlapikas, M. Puce˙ta, S. Tamulevičius, J. Matukas
  • Vacuum, December 2004, Elsevier
  • DOI: 10.1016/j.vacuum.2004.08.007

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http://dx.doi.org/10.1016/j.vacuum.2004.08.007