In situ ellipsometric study of copper growth on silicon

Francisc Haidu, Ovidiu D. Gordan, Dietrich R.T. Zahn
  • Thin Solid Films, April 2012, Elsevier
  • DOI: 10.1016/j.tsf.2012.02.060

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The following have contributed to this page: Professor Dietrich RT Zahn