Effect of filament temperature and deposition time on the formation of tungsten silicide with silane

Chris E. Sveen, Yujun Shi
  • Thin Solid Films, May 2011, Elsevier
  • DOI: 10.1016/j.tsf.2011.01.327
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http://dx.doi.org/10.1016/j.tsf.2011.01.327

The following have contributed to this page: Yujun Shi