Determination of substitutional carbon content in rapid thermal chemical vapour deposited Si1−x−yGexCy on Si (1 0 0) using Raman spectroscopy

  • Joanna Wasyluk, Tatiana S. Perova, Francoise Meyer
  • Thin Solid Films, January 2010, Elsevier
  • DOI: 10.1016/j.tsf.2009.10.076

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http://dx.doi.org/10.1016/j.tsf.2009.10.076

The following have contributed to this page: Professor Tatiana Perova