Crystallization of HWCVD amorphous silicon thin films at elevated temperatures

  • Theo F.G. Muller, Dirk Knoesen, Chris Arendse, Ryno Swanepoel, Sylvain Halindintwali, Chris Theron
  • Thin Solid Films, April 2006, Elsevier
  • DOI: 10.1016/j.tsf.2005.07.133

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http://dx.doi.org/10.1016/j.tsf.2005.07.133