The electrical and structural properties of the hydrogenated amorphous carbon films grown by close field unbalanced magnetron sputtering

  • Yong Seob Park, Hyun Sik Myung, Jeon Geon Han, Byungyou Hong
  • Thin Solid Films, June 2005, Elsevier
  • DOI: 10.1016/j.tsf.2004.11.160

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http://dx.doi.org/10.1016/j.tsf.2004.11.160

The following have contributed to this page: Professor Jeon Geon Han