Contributions to the static dielectric constant of low-k xerogel films derived from ellipsometry and IR spectroscopy

C. Himcinschi, M. Friedrich, S. Frühauf, S.E. Schulz, T. Gessner, D.R.T. Zahn
  • Thin Solid Films, May 2004, Elsevier
  • DOI: 10.1016/j.tsf.2003.11.241
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The following have contributed to this page: Professor Dietrich RT Zahn