Surface reaction mechanisms for atomic layer deposition of silicon nitride

Collin Mui, Yuniarto Widjaja, Jeung Ku Kang, Charles B. Musgrave
  • Surface Science, May 2004, Elsevier
  • DOI: 10.1016/j.susc.2004.03.029
The author haven't finished explaining this publicationThe author haven't finished explaining this publication

The following have contributed to this page: Charles Musgrave