Phase tailoring of tantalum thin films deposited in deep oscillation magnetron sputtering mode

Fábio Ferreira, Cláudio Sousa, Albano Cavaleiro, André Anders, João Oliveira
  • Surface and Coatings Technology, March 2017, Elsevier
  • DOI: 10.1016/j.surfcoat.2016.08.017
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http://dx.doi.org/10.1016/j.surfcoat.2016.08.017

The following have contributed to this page: Professor Andre Anders