Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres

Robert Franz, Peter Polcik, André Anders
  • Surface and Coatings Technology, June 2015, Elsevier
  • DOI: 10.1016/j.surfcoat.2015.03.047
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The following have contributed to this page: Professor Andre Anders