Deposition of AZO thin film using RF and ICP at facing magnetron sputtering system

  • Hye Ran Kim, Jay Bum Kim, Yoon Seok Choi, Masaru Hori, Jeon Geon Han
  • Surface and Coatings Technology, November 2014, Elsevier
  • DOI: 10.1016/j.surfcoat.2014.07.035

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http://dx.doi.org/10.1016/j.surfcoat.2014.07.035

The following have contributed to this page: Professor Jeon Geon Han