A micromachined nanoindentation force sensor

Alexandra Nafari, Andrey Danilov, Henrik Rödjegård, Peter Enoksson, Håkan Olin
  • Sensors and Actuators A Physical, September 2005, Elsevier
  • DOI: 10.1016/j.sna.2005.03.068
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The following have contributed to this page: Professor Håkan Olin