Stress imaging in structural challenging MEMS with high sensitivity using micro-Raman spectroscopy

Peter Meszmer, Raul D. Rodriguez, Evgeniya Sheremet, Dietrich R.T. Zahn, Bernhard Wunderle
  • Microelectronics Reliability, December 2017, Elsevier
  • DOI: 10.1016/j.microrel.2017.10.010

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http://dx.doi.org/10.1016/j.microrel.2017.10.010

The following have contributed to this page: Professor Dietrich RT Zahn