Effect of thermal stresses on stability and frequency response of a capacitive microphone

Armin Saeedivahdat, Fatemeh Abdolkarimzadeh, Ashkan Feyzi, Ghader Rezazadeh, Saeed Tarverdilo
  • Microelectronics Journal, December 2010, Elsevier
  • DOI: 10.1016/j.mejo.2010.07.013

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http://dx.doi.org/10.1016/j.mejo.2010.07.013