Back-end-of-line compatible contact materials for carbon nanotube based interconnects

Holger Fiedler, Marius Toader, Sascha Hermann, Michael Rennau, Raul D. Rodriguez, Evgeniya Sheremet, Michael Hietschold, Dietrich R.T. Zahn, Stefan E. Schulz, Thomas Gessner
  • Microelectronic Engineering, April 2015, Elsevier
  • DOI: 10.1016/j.mee.2014.11.004
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The following have contributed to this page: Professor Dietrich RT Zahn