Carbon nanotube based via interconnects: Performance estimation based on the resistance of individual carbon nanotubes

Holger Fiedler, Marius Toader, Sascha Hermann, Raul D. Rodriguez, Evgeniya Sheremet, Michael Rennau, Steffen Schulze, Thomas Waechtler, Michael Hietschold, Dietrich R.T. Zahn, Stefan E. Schulz, Thomas Gessner
  • Microelectronic Engineering, May 2014, Elsevier
  • DOI: 10.1016/j.mee.2013.07.007

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http://dx.doi.org/10.1016/j.mee.2013.07.007

The following have contributed to this page: Professor Dietrich RT Zahn