Functional epoxy polymer for direct nano-imprinting of micro-optical elements

R. Fader, J. Landwehr, M. Rumler, M. Rommel, A.J. Bauer, L. Frey, R. Völkel, M. Brehm, A. Kraft
  • Microelectronic Engineering, October 2013, Elsevier
  • DOI: 10.1016/j.mee.2013.02.030
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The following have contributed to this page: Dr. Mathias Rommel