Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography

H. Schmitt, P. Duempelmann, R. Fader, M. Rommel, A.J. Bauer, L. Frey, M. Brehm, A. Kraft
  • Microelectronic Engineering, October 2012, Elsevier
  • DOI: 10.1016/j.mee.2012.04.032
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The following have contributed to this page: Dr. Mathias Rommel