Fabrication of metallic SPM tips by combining UV nanoimprint lithography and focused ion beam processing

J.D. Jambreck, H. Schmitt, B. Amon, M. Rommel, A.J. Bauer, L. Frey
  • Microelectronic Engineering, May 2010, Elsevier
  • DOI: 10.1016/j.mee.2009.11.040
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The following have contributed to this page: Dr. Mathias Rommel