Experimental observation of FIB induced lateral damage on silicon samples

G. Spoldi, S. Beuer, M. Rommel, V. Yanev, A.J. Bauer, H. Ryssel
  • Microelectronic Engineering, April 2009, Elsevier
  • DOI: 10.1016/j.mee.2009.01.003
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The following have contributed to this page: Dr. Mathias Rommel