Filling behavior of UV nanoimprint resin observed by using a midair structure mold

Jun Taniguchi, Ken-ichi Machinaga, Noriyuki Unno, Nobuji Sakai
  • Microelectronic Engineering, April 2009, Elsevier
  • DOI: 10.1016/j.mee.2008.12.085

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The following have contributed to this page: Dr Jun Taniguchi