A review of line edge roughness and surface nanotexture resulting from patterning processes

  • Evangelos Gogolides, Vassilios Constantoudis, George P. Patsis, Angeliki Tserepi
  • Microelectronic Engineering, April 2006, Elsevier
  • DOI: 10.1016/j.mee.2006.01.162

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http://dx.doi.org/10.1016/j.mee.2006.01.162