Structural and optical evaluation of WOxNy films deposited by reactive magnetron sputtering

S.H. Mohamed, André Anders, I. Montero, L. Galán
  • Journal of Physics and Chemistry of Solids, December 2007, Elsevier
  • DOI: 10.1016/j.jpcs.2007.06.005
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The following have contributed to this page: Professor Andre Anders