A systematic study on metal-assisted chemical etching of high aspect ratio silicon nanostructures

  • Ali Ghafarinazari, Masoud Mozafari
  • Journal of Alloys and Compounds, December 2014, Elsevier
  • DOI: 10.1016/j.jallcom.2014.07.044

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http://dx.doi.org/10.1016/j.jallcom.2014.07.044

The following have contributed to this page: Masoud Mozafari