Ultrasonic vibration mill-grinding of single-crystal silicon carbide for pressure sensor diaphragms

Jian Li, Daxi Geng, Deyuan Zhang, Wei Qin, Yonggang Jiang
  • Ceramics International, February 2018, Elsevier
  • DOI: 10.1016/j.ceramint.2017.11.077

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http://dx.doi.org/10.1016/j.ceramint.2017.11.077