Cubic boron nitride films by d.c. and r.f. magnetron sputtering: layer characterization and process diagnostics

J. Hahn, M. Friedrich, R. Pintaske, M. Schaller, N. Kahl, D.R.T. Zahn, F. Richter
  • Diamond and Related Materials, August 1996, Elsevier
  • DOI: 10.1016/0925-9635(95)00507-2

The authors haven't finished explaining this publication. If you are the author, sign in to claim or explain your work.

Read Publication

The following have contributed to this page: Professor Dietrich RT Zahn