Cubic boron nitride films by d.c. and r.f. magnetron sputtering: layer characterization and process diagnostics

J. Hahn, M. Friedrich, R. Pintaske, M. Schaller, N. Kahl, D.R.T. Zahn, F. Richter
  • Diamond and Related Materials, August 1996, Elsevier
  • DOI: 10.1016/0925-9635(95)00507-2
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http://dx.doi.org/10.1016/0925-9635(95)00507-2

The following have contributed to this page: Professor Dietrich RT Zahn