Microstructural properties of amorphous silicon alloys deposited by dc magnetron source

  • Davor Gracin, Nikola Radić, UrošV Desnica
  • Vacuum, August 1995, Elsevier
  • DOI: 10.1016/0042-207x(95)00078-x

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http://dx.doi.org/10.1016/0042-207x(95)00078-x