Structure and ammonia sensitivity of thin platinum or iridium gates in metal-oxide-silicon capacitors

A Spetz, U Helmersson, F Enquist, M Armgarth, I Lundström
  • Thin Solid Films, October 1989, Elsevier
  • DOI: 10.1016/0040-6090(89)90558-0

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http://dx.doi.org/10.1016/0040-6090(89)90558-0