Interaction of copper organometallic precursors with barrier layers of Ti, Ta and W and their nitrides: a first-principles molecular dynamics study

Eduardo Machado, Marcin Kaczmarski, Benoît Braida, Pablo Ordejón, Diwakar Garg, John Norman, Hansong Cheng
  • Journal of Molecular Modeling, March 2007, Springer Science + Business Media
  • DOI: 10.1007/s00894-007-0187-6

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http://dx.doi.org/10.1007/s00894-007-0187-6

The following have contributed to this page: Professor Hansong Cheng