Cycling reliability of RF-MEMS switches with Gold–Platinum multilayers as contact material

Viviana Mulloni, Benno Margesin, Paola Farinelli, Romolo Marcelli, Andrea Lucibello, Giorgio De Angelis
  • Microsystem Technologies, December 2015, Springer Science + Business Media
  • DOI: 10.1007/s00542-015-2782-2

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