RF MEMS switches fabrication by using SU-8 technology

Andrea Lucibello, Emanuela Proietti, Flavio Giacomozzi, Romolo Marcelli, Giancarlo Bartolucci, Giorgio De Angelis
  • Microsystem Technologies, February 2013, Springer Science + Business Media
  • DOI: 10.1007/s00542-013-1753-8

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http://dx.doi.org/10.1007/s00542-013-1753-8

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