Gold-based thin multilayers for ohmic contacts in RF-MEMS switches

V. Mulloni, J. Iannacci, R. Bartali, V. Micheli, S. Colpo, N. Laidani, B. Margesin
  • Microsystem Technologies, January 2012, Springer Science + Business Media
  • DOI: 10.1007/s00542-011-1421-9

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