Mechanical modelling of capacitive RF MEMS shunt switches

Romolo Marcelli, Andrea Lucibello, Giorgio De Angelis, Emanuela Proietti, Daniele Comastri
  • Microsystem Technologies, January 2010, Springer Science + Business Media
  • DOI: 10.1007/s00542-009-1007-y

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http://dx.doi.org/10.1007/s00542-009-1007-y

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