Gettering of implanted Au in MeV?C implanted Si

S. Mohapatra, B. Joseph, B. Satpati, D.P. Mahapatras
  • Applied Physics A, July 2005, Springer Science + Business Media
  • DOI: 10.1007/s00339-005-3297-y

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http://dx.doi.org/10.1007/s00339-005-3297-y

The following have contributed to this page: Biswarup Satpati and Dr. Satyabrata Mohapatra