What is it about?
This paper deals with the numerical modeling of 3D structure of surface micromachined MEMS different comb drive geometries.
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Why is it important?
The paper is devoted to the complex strategy of modeling, proposed by authors, of micro-actuators of comb structure. This methodology is based on vector field 3-D structural models and the object oriented models and lumped parameters as well, applied to the different structure of MEMS.
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This page is a summary of: Integrated Computer Models of 3-D Comb Drive Electrostatic MEMS Structures, January 2010, Springer Science + Business Media,
DOI: 10.1007/978-3-642-16225-1_1.
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