Integrated Computer Models of 3-D Comb Drive Electrostatic MEMS Structures

Sławomir Wiak, Krzysztof Smółka
  • January 2010, Springer Science + Business Media
  • DOI: 10.1007/978-3-642-16225-1_1

Computer Models of Electrostatic Comb Drive

What is it about?

This paper deals with the numerical modeling of 3D structure of surface micromachined MEMS different comb drive geometries.

Why is it important?

The paper is devoted to the complex strategy of modeling, proposed by authors, of micro-actuators of comb structure. This methodology is based on vector field 3-D structural models and the object oriented models and lumped parameters as well, applied to the different structure of MEMS.

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http://dx.doi.org/10.1007/978-3-642-16225-1_1

The following have contributed to this page: Krzysztof Smółka