Fabrication and Characterization of Reactively Sputtered AlInGaN Films with a Cermet Target Containing 5% Al and 7.5% In

  • Kaifan Lin, Dong-Hau Kuo
  • Journal of Electronic Materials, December 2016, Springer Science + Business Media
  • DOI: 10.1007/s11664-016-5157-2

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http://dx.doi.org/10.1007/s11664-016-5157-2

The following have contributed to this page: Professor Dong-Hau Kuo