Relative humidity influence on adhesion effect in MEMS flexible structures

  • Corina Birleanu, Marius Pustan, Florina Rusu, Cristian Dudescu, Raluca Muller, Angela Baracu
  • Microsystem Technologies, March 2018, Springer Science + Business Media
  • DOI: 10.1007/s00542-018-3848-8

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http://dx.doi.org/10.1007/s00542-018-3848-8

The following have contributed to this page: Mircea Cristian Dudescu